Focused Ion Beam 2
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| Short Name | FIB 2 |
| Model Name | JIB-4601F |
| Laboratory | 미세구조분석실//[81B104]집속이온빔(FIB) |
| maker | JEOL.LTD. |
| Installed Year/Price | 201305 / 1,250,000,000 |
| Staff Name | 김영미(Kim Youngmi) 031-299-6729 |
| Main Appplication Field | |
| A low-vacuum mode enables SEM observation without any coating of insulating material, so it can be used in almost any field. The FIB can be used for fine milling and TEM thin-film sample preparation. 3-dimensional images can be reconstructed to provide a better understanding of the internal structure of the specimen. | |
| Basic Specification | |
| Ion source : Ga liquid metal ion source, Accelerating voltages : 1 to 30 kV (in 5 kV steps), Image resolution : 5 nm (at 30 kV), Beam current : Up to 60 nA (at 30 kV) | |